Introduction
Control of contaminants is a major challenge to secure optics life time in EUV lithography systems. One of the major sources of contaminants is air permeation through elastomer seals. These contaminants also end up in the vacuum chamber of the scanner where they affect the expensive optics, the requirements on leak tightness for seals becomes increasingly important, and precise knowledge on permeation of the used materials is key. To develop systems with predictable performance, accurate characterization of permeation through materials according the ASML application are needed. This internship assignment concerns the qualification of permeation of various vacuum seals and seals-materials under different conditions and different gasses. You will be part of the Vacuum Systems group within the EUV department of ASML.
Your Assignment
In this Internship assignment you will:
- Adapt the existing setup to perform characterization measurements of O-ring permeation measurements according to ASML standards;
- Develop a procedure to execute the measurements (including loading and conditioning of the sample) and calibration of the setup for He, O2 and N2 measurements using different calibrated leaks, finding the typical time to achieve (constant) maximum permeation for the different materials in the specified O-ring sizes and their relation to compression;
- Make a measurement template;
- Make an accuracy calculation of the measurement;
- Measure various new materials for improved vacuum seal O-rings under different conditions, identify critical parameters and sensitivities;
- Advise on the use of these O-ring materials in ASML vacuum applications;
Your Profile
- Are busy with your bachelor's or master's in Physics, Mechanical Engineering, Materials Science, Chemical Engineering, or related;
- Have some affinity with vacuum technology and materials science;
- Have some hands-on experience with experiments;
- Possess good analysis skills;
- Have good communication skills in English (verbal and written).
Other requirements you need to meet:
- You are enrolled at an educational institute for the entire duration of the internship;
- You are located in the Netherlands to perform your internship. In case you are currently living/studying outside of the Netherlands, your CV/motivation letter includes the willingness to relocate;
- If you are a non-EU citizen, studying in the Netherlands, your university is willing to sign the documents relevant for doing an internship (i.e., Nuffic agreement).
